(※ 본 장비에서는 파우더 및 자성물질 측정시 담당자와 사전협의 후 진행 하오니 예약 신청 시 참고 바랍니다.)

SE image resolution  : 0.7 nm guaranteed or better (at 15kV, GB mode)

                                    1.2nm guaranteed or better (at 1kV, GB mode)

                                    0.7 nm guaranteed or better (at 1kV, GBSH mode)

                                    3.0nm guaranteed or better (at 5kV, 5nA, WD10mm)

Accelerating voltage  : 0.01 to 30 kV (SEM mode &GB mode) or wider

Sample bias voltage  : 0 to 5kV

Probe current  : pA to 500nA or better

Magnification  : x25 to 1,000,000

Electron Gun  : In-lens Schottky Plus field emission electron gun

Objective lens  : Super Hybrid Lens

Dual EDS Detector System  : LN2 Free SDD type , 150mm 2  or larger

Energy resolution  : ≤127eV at 20,000cps, (Mn Ka) or better